Opponent was 19/16 over 90 hands

Ok I know I messed up.
Should have just went all-in on the river but this guy looked solid, so I was skeptical if he may slowplay a set on the flop.

But he minraised so we can discount QQ preflop, he checked the flop, can discount a lot of QQ, he checked the turn, now we can again discount a lot of QQ.

I can give him on the river 1 combo of 99 and 0,3 combos of 22 and maybe 0,5 combo of QQ but then he has those overplayed A high flushes, although that makes no fkin sense against my raising range there but I have to give him at least 5 missplayed Ace high flushes so I have a clear valueshove on the river.

Any thought or suggestions?

Is my analysis correct and I missplayed that river or is it good to play it cautiously?